Prof. Dr. Zewen Liu received his BS degree in Physics from the University of Science and Technology (USTC), Hefei, China in 1983 and received his Ph.D degree in Microfabrication from the University of Paris-sud (Paris Saclay University), Paris, France in 1997. Then he joined Institute of Microelectronics at Tsinghua University (IMETU) and was the vice director of the IMETU. His research interests are MEMS, Nano Technologies and Integrated Sensors. He is one of the pioneers on RF MEMS and had engaged on RF MEMS devices and applications for more than 20 years. He published about 200 academic papers and is an inventor of more than 50 patents. He is also the author of two English Book Chapters in MEMS and Nanotechnology.