Zhu Yao photo
MWS EU 2022 Speaker

Dr. Zhu Yao

  • A*STAR (Agency for Science, Technology and Research), Singapore
  • Deputy Head – Sensors, Actuators & Microsystems Department – Institute of Microelectronics (IME)
  • Biography

Zhu Yao joined Institute of Microelectronics, A*STAR as a scientist in 2014. Since 2020, she is heading the Sensors, Actuators & Microsystems research department focused on MEMS and memory technologies for emerging applications.

She received her Bachelor and PhD degrees from Nanyang Technological University.

  • Presentation
World-first 200mm “Lab-in-Fab” at ST Singapore accelerates the development of Piezo MEMS

Co-presenting with Anton Hofmeister (STMicroelectronics)

STMicroelectronics and The Institute of Microelectronics (IME) are working in close collaboration and have created a 200mm Piezo MEMS R&D line within ST’s production facilities in Singapore.

Leveraging both partners’ MEMS R&D capabilities and ST’s excellence in MEMS manufacturing, the “Lab-in-Fab” initiative provides state-of-the-art Piezo process modules to support customers in their MEMS prototyping and to help them make the transition to high-volume manufacturing.

The partnership has paved the way to exciting possibilities thanks to disruptive Piezo MEMS technologies, enabling innovations in emerging applications like smart glasses, AR headsets, LiDAR systems, wearables, and portable healthcare devices.

A*STAR logo
  • Company Profile

A*STAR (Agency for Science, Technology and Research), Singapore

The Institute of Microelectronics (IME) is a research institute of the Agency for Science, Technology and Research (A*STAR). Positioned to bridge the R&D between academia and industry, IME’s mission is to add value to Singapore’s semiconductor industry by developing strategic competencies, innovative technologies and intellectual property; enabling enterprises to be technologically competitive; and cultivating a technology talent pool to inject new knowledge to the industry. Its key research areas are in Heterogeneous Integration, System-in-Package, Sensor, Actuators and Microsystems, RF & mmWave, SiC/GaN-on-SiC Power Electronics, and MedTech.

MWS EU 2022 Agenda

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