MWS China 2021 Speaker
Prof. Guoqiang Wu
Dr. Guoqiang Wu is currently a Professor at Wuhan University. He received the Ph.D. degree in Microelectronics and Solid-State Electronics from the Shanghai Institute of Microsystem and Information Technology (SIMIT), Chinese Academy of Sciences, Shanghai, China, in 2013. His research interests include micro/nanoelectromechanical system (N/MEMS) design and integration, especially on MEMS resonators and piezoelectric sensors.
Aluminum Nitride-based Piezoelectric MEMS Resonators and Acoustic Sensors
Thin-film piezoelectric materials are gaining increasing importance in the MEMS industry. They offer opportunity to integrate thin film deposition in a MEMS or CMOS process. Aluminum nitride (AlN) is one of the most promising materials among the commonly used piezoelectric thin films. AlN-based bulk acoustic wave filters have demonstrated great commercial success. It has shown great potentials in the applications, from microphones to piezoelectric micromachined ultrasound transducers (PMUT), as well as thin film-based imaging device.
This talk briefly introduces the research activities on AlN-based piezoelectric MEMS resonators and acoustic sensors in our group at Wuhan University.
Wuhan University (WHU) is a comprehensive and key national university directly under the administration of the Ministry of Education. It is also one of the “211 Project” and “985 Project” universities with full support in the construction and development from the central and local government of China.